FS4001 Series Mass Flow Sensors

- Manifold flow
assembly, leak detection,
HVAC control, clean
room air flow or
nitrogen flush
monitoring and control
- Environmental
FS4001 series mass flow sensors are manufactured using Siargo’s proprietary MEMS flow
sensor and package technology. The sensors are specially designed for low flow rate range
applications from 0 ~ 30 sccm up to 0 ~ 1000 sccm.   The maximum flow rate for each model is
manufactured via specially designed package as well as smart electronics so that the optimal
sensitivity would be achieved.   

Features and Applications
- Low mass flow range from  0 ~ 30 sccm up to 0 ~ 1000 sccm
- Outstanding accuracy of ±1.5 %
- Fast response (4 ms selectable)
- Pressure rating up to 5 bar (73 psi)
- Analog and/or digital user interface  
- Easy installation

Mechanical Dimensions


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Mass Flow Sensors