FS5001 Series Mass Flow Sensors
Applications

- Manifold flow
assembly, leak detection,
HVAC control, clean
room air flow or
nitrogen flush
monitoring and control
- Environmental
equipments
FS5001 series mass flow sensors are designed for general purpose flow monitoring and control
applications. The sensors directly measure mass flow in the designed channel with trace flow
detection capability. The lowest flow it can detect is 20 μ L/min. These sensors can readily be
applied for manifold flow assembly, leak detection, HVAC control, clean room air flow or nitrogen
flush monitoring and control, environmental equipments such as air sampler, analytical
instrumentation such as GC spectrometer.

FS5001 can be configured to measure flow full scale from 100 sccm to 1000 sccm (1 SLPM).
With a full spectrum of customizable adaptors, it can be plug-and-play in many applications.

Features and Applications
- Low mass flow detectable from 0 ~ 100 sccm up to 0 ~ 1000 sccm
- Outstanding accuracy of 1.5%
- Response time < 100 ms
- Pressure rating up to 5 bar (73 psi)
- Output: analog or both analog and digital

Mechanical Dimensions














Specifications





















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Mass Flow Sensors