The FS1015E series mass flow sensors are specifically designed for medical equipment gas-flow monitoring and control applications. They are manufactured with Siargo’s proprietary MEMS Thermal-D sensing chip, which captures thermal transfer data of the flow medium in both the space and time domains. The sensors directly measure mass flow with minimal pressure loss. The current models can be readily applied to ventilators, endoscopes, and anesthesia equipment. FS1015E can measure a flow up to 150 SLPM. The ISO 15mm medical connection is designed for seamless plug-and-play compatibility with medical equipment.

The FS1100 series mass flow sensors are manufactured with Siargo’s proprietary MEMS Thermal-D sensing chip, which captures thermal transfer data of the flow medium in both the space and time domains. Compared to conventional calorimetric sensing, it offers significantly better linearity across the full dynamic range, eliminates gas sensitivity for gases with similar thermal diffusivities, and enhances measurement accuracy when used with a gas conversion factor. It also simultaneously outputs the instant flow medium temperature data and improves the temperature performance of the thermal sensing approach.

The FS4001E series mass flow sensors are designed for instrumentation and process gas flow control, utilizing Siargo's proprietary MEMS mass flow sensors and smart electronic circuitry. The sensors directly measure mass flow in the sub-liter-per-minute range with high accuracy and a fast response time. The current models can also be configured with a small LCD. FS4001E can measure a full-scale flow from 30 sccm to 1000 sccm. The barbed connector is easily connected to a soft tube.

The FS4308 series mass flow sensors are designed for general-purpose, precise gas metering, processing, monitoring, and/or control. The products are the third generation of the series, offering enhanced flow conditioning for greater flexibility during installation, including manifold options. FS4308 also has a smaller footprint than its previous design. It has been applied to medical equipment, pneumatic control, process automation, and other industrial applications. The series offers a wide dynamic flow range, with a working pressure rating of up to 0.8 MPa （10 bar or 117 psi）, and a compensated temperature range of -10 to +55°C.

The FS5001E series mass flow sensors are designed for general-purpose flow metering and control applications, featuring manifold mounting and utilizing Siargo's proprietary MEMS mass flow sensing technology and innovative electronic circuitry. The sensors directly measure mass flow. The current models can be readily applied to analytical instruments, such as gas chromatography, air samplers, and low-vacuum systems, as well as many other process control applications. FS5001E has two versions: one for sub-liter-per-minute flow and another for up to 15 SLPM flow. It can also be used for measuring bypass flow.

The FS5002 series mass flow sensors are designed for general-purpose gas flow monitoring and control applications, featuring a full-scale mass flow rate range of 10 to 1000 sccm and supporting both analog and digital outputs. The series offers a wide dynamic flow range, with a working pressure rating of up to 0.5 MPa （5 bar or 73 psi） and a compensated temperature range of -10 to +55°C. Typical applications include air samplers, analyzers, and low-vacuum purging.

The FS6122 series mass flow sensors provide a unique solution for multi-parameter flow measurement, featuring mass flow, gauge pressure, temperature, and humidity. It is designed for medical respiratory equipment and can also be applied to general-purpose flow metering and control applications. The sensors were designed with a super-low-pressure loss. The current models can be readily applied to ventilators, respiratory analyzers, CPAP devices, and other medical devices, as well as environmental monitoring and various process control applications. FS6122 can measure uni- or bi-directional flow up to 250 SLPM, as well as ±100 cmH2O gauge pressure, temperature, and relative humidity. The connectors can be fully customized.

The FS7002 series mass flow sensors are designed for general-purpose flow metering and control applications, utilizing Siargo's proprietary MEMS mass flow sensing technology and smart electronic circuitry. The sensors directly measure mass flow with a miniaturized package. The current models can be readily applied to vent passage monitoring, fan or motor monitoring, open-space airflow monitoring, and clog detection. It is also an enabler for applications involving oxygen delivery and other gas delivery in limited spaces. The FS7002 has two models. FS7002 is the nonlinear version with analog output, and FS7002L is the linearized version with I2C output. FS7002 can measure flow speeds of up to 15m/sec.

The FS8000 series mass flow sensors are designed for general-purpose flow metering and control applications, utilizing Siargo's proprietary MEMS mass flow sensing technology and innovative electronic circuitry. The sensors directly measure mass flow with a very fast response time. The current models can be readily applied to high-throughput automation equipment control, such as semiconductor die attachment, as well as other applications, including air samplers, leakage detection, and air sprayers. The FS8000 primarily offers mass flow rate measurements on a full-scale from 30 to 500 sccm, with a dynamic range of 100:1 for the FS8001E and up to 6 SLPM for the FS8003E.