Our MEMS Thermal-D and thermal time-of-flight (TTOF) proprietary sensing technologies offer unprecedented performances beyond the traditional calorimetry or anemometry and are enabled with multi-parameter sensing capability. For detailed information, please download the technical whitepapers from the literature links below.
Technical Whitepaper: Thermal-D mass flow sensing technology
Technical Whitepaper: Thermal time-of-flight sensing technology
The MEMS mass flow sensors and meters are manufactured with our MEMS sensors with a wide spectrum of interfaces, IoT options, and sophisticated packages. The products can be applied for mass flow metering ranging from nanoliter per minute to thousands of cubic meters per hour. Applications include medical gases and respiratory analysis smart energy (LPG, natural gases, hydrogen, and biogases) and many other industrial process monitoring and measurement.
The MEMS mass flow controllers will offer a super fast advanced control scheme, and multi-parameter control option in addition to the conventional mass flow control configurations and industrial bus interfaces.
